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Rob Wolters
Rob Wolters
Verified email at utwente.nl
Title
Cited by
Cited by
Year
Low-cost and nanoscale non-volatile memory concept for future silicon chips
MHR Lankhorst, BW Ketelaars, RAM Wolters
Nature materials 4 (4), 347-352, 2005
12112005
Read-proof hardware from protective coatings
P Tuyls, GJ Schrijen, B Škorić, J Geloven, N Verhaegh, R Wolters
International Workshop on Cryptographic Hardware and Embedded Systems, 369-383, 2006
5202006
Transition metal silicides in silicon technology
AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra
Reports on Progress in Physics 56 (11), 1397, 1993
2141993
Transition metal silicides in silicon technology
AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra
Reports on Progress in Physics 56 (11), 1397, 1993
2141993
Fabrication and characterization of the charge-plasma diode
B Rajasekharan, RJE Hueting, C Salm, T van Hemert, RAM Wolters, ...
IEEE electron device letters 31 (6), 528-530, 2010
1972010
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent 10,714,385, 2020
1852020
Lithographic apparatus and device manufacturing method
EAF Van Der Pasch, EJM Eussen
US Patent 7,602,489, 2009
1392009
A self‐aligned cobalt silicide technology using rapid thermal processing
L Van den Hove, R Wolters, K Maex, R De Keersmaecker, G Declerck
Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986
1061986
Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range
N Stavitski, MJH Van Dal, A Lauwers, C Vrancken, AY Kovalgin, ...
IEEE electron device letters 29 (4), 378-381, 2008
982008
Method of manufacturing a semiconductor device comprising capacitors which form memory elements and comprise a ferroelectric dielectric material having multilayer lower and …
RAM Wolters, MJE Ulenaers
US Patent 5,122,477, 1992
811992
Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N)
AG Dirks, RAM Wolters, AEM De Veirman
Thin Solid Films 208 (2), 181-188, 1992
791992
A self-aligned CoSi2interconnection and contact technology for VLSI applications
R Wolters, K Maex, RF De Keersmaecker, GJ Declerck
IEEE transactions on electron devices 34 (3), 554-561, 1987
741987
On the microstructure-property relationship of WTi (N) diffusion barriers
AG Dirks, RAM Wolters, AJM Nellissen
Thin Solid Films 193, 201-210, 1990
681990
Growth kinetics and oxidation mechanism of ALD TiN thin films monitored by in situ spectroscopic ellipsometry
H Van Bui, AW Groenland, AAI Aarnink, RAM Wolters, J Schmitz, ...
Journal of the Electrochemical Society 158 (3), H214, 2011
642011
Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells
DT Castro, L Goux, GAM Hurkx, K Attenborough, R Delhougne, J Lisoni, ...
2007 IEEE International Electron Devices Meeting, 315-318, 2007
622007
Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization
N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters
IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009
602009
Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization
N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters
IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009
602009
Selective deposition of tungsten
AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters
US Patent App. 16/926,192, 2020
592020
Nature Mater. 4, 347 (2005)
MHR Lankhorst, B Ketelaars, RAM Wolters
582008
Semiconductor device having a ferroelectric memory element with a lower electrode provided with an oxygen barrier
RAM Wolters, JHHM Kemperman
US Patent 5,744,832, 1998
481998
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