| Low-cost and nanoscale non-volatile memory concept for future silicon chips MHR Lankhorst, BW Ketelaars, RAM Wolters Nature materials 4 (4), 347-352, 2005 | 1291 | 2005 |
| Read-proof hardware from protective coatings P Tuyls, GJ Schrijen, B Škorić, J Van Geloven, N Verhaegh, R Wolters Cryptographic Hardware and Embedded Systems-CHES 2006: 8th International …, 2006 | 561 | 2006 |
| Selective deposition of tungsten AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters US Patent 10,714,385, 2020 | 287 | 2020 |
| Fabrication and characterization of the charge-plasma diode B Rajasekharan, RJE Hueting, C Salm, T Van Hemert, RAM Wolters, ... IEEE electron device letters 31 (6), 528-530, 2010 | 234 | 2010 |
| Transition metal silicides in silicon technology AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra Reports on Progress in Physics 56 (11), 1397, 1993 | 218 | 1993 |
| Transition metal silicides in silicon technology AH Reader, AH Van Ommen, PJW Weijs, RAM Wolters, DJ Oostra Reports on Progress in Physics 56 (11), 1397, 1993 | 218 | 1993 |
| Selective deposition of tungsten AY Kovalgin, M Yang, AAI Aarnink, RAM Wolters US Patent App. 16/926,192, 2020 | 161 | 2020 |
| Systematic TLM measurements of NiSi and PtSi specific contact resistance to n-and p-type Si in a broad doping range N Stavitski, MJH Van Dal, A Lauwers, C Vrancken, AY Kovalgin, ... IEEE electron device letters 29 (4), 378-381, 2008 | 107 | 2008 |
| A self‐aligned cobalt silicide technology using rapid thermal processing L Van den Hove, R Wolters, K Maex, R De Keersmaecker, G Declerck Journal of Vacuum Science & Technology B: Microelectronics Processing and …, 1986 | 107 | 1986 |
| Lithographic apparatus and device manufacturing method EAF Van Der Pasch, EJM Eussen US Patent 7,602,489, 2009 | 104 | 2009 |
| Method of manufacturing a semiconductor device comprising capacitors which form memory elements and comprise a ferroelectric dielectric material having multilayer lower and … RAM Wolters, MJE Ulenaers US Patent 5,122,477, 1992 | 80 | 1992 |
| Columnar microstructures in magnetron-sputtered refractory metal thin films of tungsten, molybdenum and W-Ti-(N) AG Dirks, RAM Wolters, AEM De Veirman Thin Solid Films 208 (2), 181-188, 1992 | 76 | 1992 |
| On the microstructure-property relationship of WTi (N) diffusion barriers AG Dirks, RAM Wolters, AJM Nellissen Thin Solid Films 193, 201-210, 1990 | 75 | 1990 |
| Growth kinetics and oxidation mechanism of ALD TiN thin films monitored by in situ spectroscopic ellipsometry H Van Bui, AW Groenland, AAI Aarnink, RAM Wolters, J Schmitz, ... Journal of the Electrochemical Society 158 (3), H214, 2011 | 72 | 2011 |
| A self-aligned CoSi2interconnection and contact technology for VLSI applications R Wolters, K Maex, RF De Keersmaecker, GJ Declerck IEEE transactions on electron devices 34 (3), 554-561, 1987 | 70 | 1987 |
| Evidence of the thermo-electric Thomson effect and influence on the program conditions and cell optimization in phase-change memory cells DT Castro, L Goux, GAM Hurkx, K Attenborough, R Delhougne, J Lisoni, ... 2007 IEEE International Electron Devices Meeting, 315-318, 2007 | 63 | 2007 |
| Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009 | 62 | 2009 |
| Cross-bridge Kelvin resistor structures for reliable measurement of low contact resistances and contact interface characterization N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalgin, RAM Wolters IEEE transactions on semiconductor manufacturing 22 (1), 146-152, 2009 | 62 | 2009 |
| On the difference between optically and electrically determined resistivity of ultra-thin titanium nitride films H Van Bui, AY Kovalgin, RAM Wolters Applied surface science 269, 45-49, 2013 | 59 | 2013 |
| Nature Mater. 4, 347 (2005) MHR Lankhorst, B Ketelaars, RAM Wolters | 58 | 2008 |
