Michael Kraft
Michael Kraft
KU Leuven, ESAT-MNS, Full Professor of Micro- and Nanosystems
Verified email at - Homepage
Cited by
Cited by
MEMS Physical Sensors
S Beeby, G Ensell, M Kraft, N White
Artech House, 2004
A review on coupled MEMS resonators for sensing applications utilizing mode localization
C Zhao, MH Montaseri, GS Wood, SH Pu, AA Seshia, M Kraft
Sensors and Actuators A: Physical 249, 93-111, 2016
Microfabricated high-finesse optical cavity with open access and small volume
M Trupke, EA Hinds, S Eriksson, EA Curtis, Z Moktadir, E Kukharenka, ...
Applied Physics Letters 87 (21), 2005
An acceleration sensing method based on the mode localization of weakly coupled resonators
H Zhang, B Li, W Yuan, M Kraft, H Chang
Journal of Microelectromechanical Systems 25 (2), 286-296, 2016
A monolithic surface micromachined Z-axis gyroscope with digital output
X Jiang, JI Seeger, M Kraft, BE Boser
2000 Symposium on VLSI Circuits. Digest of Technical Papers (Cat. No …, 2000
A force sensor based on three weakly coupled resonators with ultrahigh sensitivity
C Zhao, GS Wood, J Xie, H Chang, SH Pu, M Kraft
Sensors and Actuators A: Physical 232, 151-162, 2015
Electroplating moulds using dry film thick negative photoresist
E Kukharenka, MM Farooqui, L Grigore, M Kraft, N Hollinshead
Journal of Micromechanics and Microengineering 13 (4), S67, 2003
A high-performance accelerometer with a fifth-order sigma–delta modulator
Y Dong, M Kraft, C Gollasch, W Redman-White
Journal of micromechanics and microengineering 15 (7), S22, 2005
Electromechanical Sigma-Delta Modulators (ΣΔM) Force Feedback Interfaces for Capacitive MEMS Inertial Sensors: A Review
F Chen, X Li, M Kraft
IEEE Sensors Journal 16 (17), 2016
Fabrication and operation of a two-dimensional ion-trap lattice on a high-voltage microchip
RC Sterling, H Rattanasonti, S Weidt, K Lake, P Srinivasan, SC Webster, ...
Nature communications 5 (1), 3637, 2014
Micromachined inertial sensors: The state-of-the-art and a look into the future
M Kraft
Measurement and Control 33 (6), 164-168, 2000
Closed-loop silicon accelerometers
M Kraft, CP Lewis, TG Hesketh
IEE Proceedings-Circuits, Devices and Systems 145 (5), 325-331, 1998
A Three Degree-of-Freedom Weakly Coupled Resonator Sensor With Enhanced Stiffness Sensitivity
C Zhao, GS Wood, J Xie, H Chang, SH Pu, M Kraft
IEEE/ASME Journal of MEMS 25 (1), 38-51, 2015
Microfluidic enzymatic biosensing systems: A review
S Mross, S Pierrat, T Zimmermann, M Kraft
Biosensors and Bioelectronics 70, 376-391, 2015
Micromachined Accelerometers with Sub-µg/√ Hz Noise Floor: A Review
C Wang, F Chen, Y Wang, S Sadeghpour, C Wang, M Baijot, R Esteves, ...
Sensors 20 (14), 4054, 2020
MEMS mechanical sensors. Artech House
S Beeby, G Ensell, M Kraft, N White
Inc. Boston, London, 104-105, 2004
A dicing free SOI process for MEMS devices
I Sari, I Zeimpekis, M Kraft
Microelectronic Engineering 95, 121-129, 2012
Higher order noise-shaping filters for high-performance micromachined accelerometers
Y Dong, M Kraft, W Redman-White
Instrumentation and Measurement, IEEE Transactions on 56 (5), 1666-1674, 2007
An integrated surface micromachined capacitive lateral accelerometer with 2μG/√ Hz resolution
X Jiang, F Wang, M Kraft, BE Boser
Solid-State Sensor, Actuator and Microsystems Workshop. South Carolina, USA …, 2002
Droplet formation by squeezing in a microfluidic cross-junction
S Van Loo, S Stoukatch, M Kraft, T Gilet
Microfluidics and Nanofluidics 20, 1-12, 2016
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