Volgen
Johannes Vanpaemel
Johannes Vanpaemel
Researcher at Umicore
Geverifieerd e-mailadres voor eu.umicore.com
Titel
Geciteerd door
Geciteerd door
Jaar
The formation mechanism of 3D porous anodized aluminum oxide templates from an aluminum film with copper impurities
J Vanpaemel, AM Abd-Elnaiem, S De Gendt, PM Vereecken
The Journal of Physical Chemistry C 119 (4), 2105-2112, 2015
362015
Electrochemical deposition of subnanometer Ni films on TiN
J Vanpaemel, M Sugiura, D Cuypers, MH van der Veen, S De Gendt, ...
Langmuir 30 (8), 2047-2053, 2014
262014
EUV lithography imaging using novel pellicle membranes
I Pollentier, J Vanpaemel, JU Lee, C Adelmann, H Zahedmanesh, ...
Extreme Ultraviolet (EUV) Lithography VII 9776, 587-600, 2016
252016
Properties and performance of EUVL pellicle membranes
EE Gallagher, J Vanpaemel, I Pollentier, H Zahedmanesh, C Adelmann, ...
Photomask Technology 2015 9635, 206-213, 2015
232015
Growth and integration challenges for carbon nanotube interconnects
J Vanpaemel, M Sugiura, Y Barbarin, S De Gendt, Z Tökei, PM Vereecken, ...
Microelectronic engineering 120, 188-193, 2014
232014
Enhanced nucleation of Ni nanoparticles on TiN through H3BO3-mediated growth inhibition
J Vanpaemel, MH van der Veen, S De Gendt, PM Vereecken
Electrochimica Acta 109, 411-418, 2013
192013
Introducing the EUV CNT pellicle
JU Lee, J Vanpaemel, I Pollentier, C Adelmann, H Zahedmanesh, ...
Photomask Technology 2016 9985, 26-33, 2016
182016
Dual role of hydrogen in low temperature plasma enhanced carbon nanotube growth
J Vanpaemel, MH van der Veen, DJ Cott, M Sugiura, I Asselberghs, ...
The Journal of Physical Chemistry C 119 (32), 18293-18302, 2015
132015
Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
MH van der Veen, B Vereecke, M Sugiura, Y Kashiwagi, X Ke, DJ Cott, ...
2012 IEEE International Interconnect Technology Conference, 1-3, 2012
82012
Optical testing of EUV pellicle materials
I Pollentier, J Vanpaemel, H Zahedmanesh, C Adelmann, C Huyghebaert, ...
42015
200 mm Ge wafer production for oxide-free Si-Ge direct wafer bonding
B Rebhan, J Vanpaemel, V Dragoi
ECS Transactions 98 (4), 87, 2020
32020
Interconnected Ni Nanowire scaffolds for fast-charging 3D thin-film Lithium-Ion batteries
SP Zankowski, J Vanpaemel, PM Vereecken
Electrochemical Society Meeting Abstracts 230, 459-459, 2016
12016
Fundamental study of nanoscale processes for the integration of carbon nanotubes in IC interconnects
J Vanpaemel
12014
Effect of boric acid on the nucleation and growth of Ni nanoparticles for CNT growth
J Vanpaemel, M Van der Veen, C Huyghebaert, S De Gendt, ...
ECS Transactions 50 (20), 29, 2013
12013
Acoustic meta-materials in MEMS bar resonators
X Rottenberg, R Jansen, Y Zhang, A Coosemans, G Delcour, K Herdewyn, ...
12010
Growth-inhibited nucleation enhancement: from high density nanoparticle deposits to nanometer thin continuous films
PM Vereecken, J Vanpaemel, M Nagar, K Strubbe, A Radisic
Electrochemical Society Meeting Abstracts 230, 1587-1587, 2016
2016
The development of an EUVL pellicle comprising carbon nanomaterials
J Vanpaemel, JU Lee, C Krishnaraj, I Pollentier, C Huyghebaert, ...
2016
The formation mechanism of 3D anodized aluminum oxide templates from an aluminum film with copper impurities
J Vanpaemel, A Abd-Elnaiem, S De Gendt, P Vereecken
2015
From High Density Nanoparticle Deposits to Nanometer Thin Continuous Films By Growth-Inhibited Nucleation Enhancement
PM Vereecken, J Vanpaemel, M Nagar, A Radisic
Electrochemical Society Meeting Abstracts 226, 912-912, 2014
2014
From high-density nanoparticle deposits to nanometer thin continuous by growth inhibited nucleation enhancement
P Vereecken, J Vanpaemel, M Nagar, A Radisic
2014
Het systeem kan de bewerking nu niet uitvoeren. Probeer het later opnieuw.
Artikelen 1–20