Dirch Hjorth Petersen
Dirch Hjorth Petersen
Senior researcher in MEMS/NEMS, DTU Nanotech, Technical University of Denmark
Verified email at nanotech.dtu.dk
Title
Cited by
Cited by
Year
Undoped and in-situ B doped GeSn epitaxial growth on Ge by atmospheric pressure-chemical vapor deposition
B Vincent, F Gencarelli, H Bender, C Merckling, B Douhard, DH Petersen, ...
Applied Physics Letters 99 (15), 152103, 2011
2212011
Graphene conductance uniformity mapping
JD Buron, DH Petersen, P Bøggild, DG Cooke, M Hilke, J Sun, ...
Nano letters 12 (10), 5074-5081, 2012
1542012
Graphene mobility mapping
JD Buron, F Pizzocchero, PU Jepsen, DH Petersen, JM Caridad, ...
Scientific reports 5 (1), 1-7, 2015
902015
Micro-four-point probe Hall effect measurement method
DH Petersen, O Hansen, R Lin, PF Nielsen
Journal of Applied Physics 104 (1), 013710, 2008
852008
A carbon nanofibre scanning probe assembled using an electrothermal microgripper
K Carlson, KN Andersen, V Eichhorn, DH Petersen, K Mølhave, IYY Bu, ...
Nanotechnology 18 (34), 345501, 2007
802007
Electrically continuous graphene from single crystal copper verified by terahertz conductance spectroscopy and micro four-point probe
JD Buron, F Pizzocchero, BS Jessen, TJ Booth, PF Nielsen, O Hansen, ...
Nano letters 14 (11), 6348-6355, 2014
782014
Graphene transport properties upon exposure to PMMA processing and heat treatments
L Gammelgaard, JM Caridad, A Cagliani, DMA Mackenzie, DH Petersen, ...
2D Materials 1 (3), 035005, 2014
652014
Rapid prototyping of nanotube-based devices using topology-optimized microgrippers
O Sardan, V Eichhorn, DH Petersen, S Fatikow, O Sigmund, P Bøggild
Nanotechnology 19 (49), 495503, 2008
652008
Accurate microfour-point probe sheet resistance measurements on small samples
S Thorsteinsson, F Wang, DH Petersen, TM Hansen, D Kjær, R Lin, ...
Review of Scientific Instruments 80 (5), 053902, 2009
642009
Multimodal electrothermal silicon microgrippers for nanotube manipulation
KN Andersen, DH Petersen, K Carlson, K Molhave, O Sardan, ...
Nanotechnology, IEEE Transactions on 8 (1), 76-85, 2009
642009
Multimodal electrothermal silicon microgrippers for nanotube manipulation
KN Andersen, DH Petersen, K Carlson, K Mølhave, O Sardan, ...
IEEE Transactions on Nanotechnology 8 (1), 76-85, 2008
642008
Mapping the electrical properties of large-area graphene
P Bøggild, DMA Mackenzie, PR Whelan, DH Petersen, JD Buron, ...
2D Materials 4 (4), 042003, 2017
632017
Review of electrical characterization of ultra-shallow junctions with micro four-point probes
DH Petersen, O Hansen, TM Hansen, P Bøggild, R Lin, D Kjær, ...
Journal of Vacuum Science & Technology B, Nanotechnology and …, 2010
552010
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions
DH Petersen, R Lin, TM Hansen, E Rosseel, W Vandervorst, ...
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer …, 2008
522008
Atomic layer deposition of ruthenium with TiN interface for sub-10 nm advanced interconnects beyond copper
LG Wen, P Roussel, OV Pedreira, B Briggs, B Groven, S Dutta, ...
ACS applied materials & interfaces 8 (39), 26119-26125, 2016
502016
Note: Optical fiber milled by focused ion beam and its application for Fabry-Pérot refractive index sensor
W Yuan, F Wang, A Savenko, DH Petersen, O Bang
Review of Scientific Instruments 82 (7), 076103, 2011
482011
Topology optimized electrothermal polysilicon microgrippers
O Sardan, DH Petersen, K Mølhave, O Sigmund, P Bøggild
Microelectronic Engineering 85 (5-6), 1096-1099, 2008
462008
Terahertz wafer-scale mobility mapping of graphene on insulating substrates without a gate
JD Buron, DMA Mackenzie, DH Petersen, A Pesquera, A Centeno, ...
Optics express 23 (24), 30721-30729, 2015
442015
Ultra shallow arsenic junctions in germanium formed by millisecond laser annealing
G Hellings, E Rosseel, E Simoen, D Radisic, DH Petersen, O Hansen, ...
Electrochemical and Solid State Letters 14 (1), H39, 2010
442010
Optimized laser thermal annealing on germanium for high dopant activation and low leakage current
M Shayesteh, D O’Connell, F Gity, P Murphy-Armando, R Yu, K Huet, ...
IEEE Transactions on Electron Devices 61 (12), 4047-4055, 2014
412014
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