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Kyle Blakeney
Kyle Blakeney
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Cited by
Year
Cu2ZnSnS4 Nanorods Doped with Tetrahedral, High Spin Transition Metal Ions: Mn2+, Co2+, and Ni2+
MJ Thompson, KJ Blakeney, SD Cady, MD Reichert, JD Pilar-Albaladejo, ...
Chemistry of Materials 28 (6), 1668-1677, 2016
492016
Atomic layer deposition of aluminum metal films using a thermally stable aluminum hydride reducing agent
KJ Blakeney, CH Winter
Chemistry of Materials 30 (6), 1844-1848, 2018
442018
Axial Composition Gradients and Phase Segregation Regulate the Aspect Ratio of Cu2ZnSnS4 Nanorods
MJ Thompson, TPA Ruberu, KJ Blakeney, KV Torres, PS Dilsaver, J Vela
The Journal of Physical Chemistry Letters 4 (22), 3918-3923, 2013
432013
Low temperature, selective atomic layer deposition of nickel metal thin films
MM Kerrigan, JP Klesko, KJ Blakeney, CH Winter
ACS applied materials & interfaces 10 (16), 14200-14208, 2018
382018
Thermal atomic layer deposition of tungsten carbide films from WCl6 and AlMe3
KJ Blakeney, CH Winter
Journal of Vacuum Science & Technology A 36 (1), 2018
182018
A Volatile Dialane Complex from Ring Expansion of an N-Heterocyclic Carbene and Its Use in the Thermal Atomic Layer Deposition of Aluminum Metal Films
KJ Blakeney, PD Martin, CH Winter
Organometallics 39 (7), 1006-1013, 2020
122020
Aluminum dihydride complexes and their unexpected application in atomic layer deposition of titanium carbonitride films
KJ Blakeney, PD Martin, CH Winter
Dalton Transactions 47 (32), 10897-10905, 2018
102018
Atomic Layer Deposition of Tungsten-Rich Tungsten Carbide Films Using WCl6 and AlH2 (tBuNCH2CH2NMe2) as Precursors
KJ Blakeney, CL Ward, CH Winter
ECS Transactions 86 (6), 41, 2018
42018
Precursors for deposition of molybdenum-containing films
KJ Blakeney
US Patent 11,821,071, 2023
22023
Process for the generation of metal-containing films
M Lukas, DD Schweinfurth, D Waldmann, CH Winter, K Blakeney, ...
US Patent 11,505,562, 2022
22022
Substantially carbon-free molybdenum-containing and tungsten-containing films in semiconductor device manufacturing
KJ Blakeney, CS Lai, TM Pratt, EH Lenz, J Stevens
US Patent App. 17/753,042, 2022
22022
A volatile dialane complex from ring-expansion of an N-heterocyclic carbene and its use in atomic layer deposition of aluminum metal films
K Blakeney, P Martin, C Winter
22018
Method of forming photo-sensitive hybrid films
EC Hansen, TW Weidman, C Wu, Q Lin, KJ Blakeney, A Lavoie, ...
US Patent App. 18/005,595, 2023
12023
Dry deposited photoresists with organic co-reactants
EC Hansen, TW Weidman, C Wu, Q Lin, KJ Blakeney
US Patent App. 18/005,169, 2023
12023
Process for the generation of metal-containing films
DD Schweinfurth, M Lukas, SV Klenk, S Weiguny, CH Winter, K Blakeney, ...
US Patent 11,319,332, 2022
12022
Synthesis Of Volatile And Thermally Stable Aluminum Hydride Complexes And Their Use In Atomic Layer Deposition Of Metal Thin Films
KJ Blakeney
Wayne State University, 2018
12018
Precursors for deposition of molybdenum-containing films
KJ Blakeney
US Patent App. 18/379,397, 2024
2024
Combined self-forming barrier and seed layer by atomic layer deposition
KJ Blakeney, Y Dordi
US Patent App. 18/041,391, 2023
2023
Metal oxide diffusion barriers
LJ Brogan, PA Van Cleemput, MM Huie, KJ Blakeney, YH Liu
US Patent App. 17/999,442, 2023
2023
Process for the generation of metal-containing films
DD Schweinfurth, M Lukas, SV Klenk, S Weiguny, CH Winter, K Blakeney, ...
US Patent 11,655,262, 2023
2023
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