| Apparatus and process for sensing fluoro species in semiconductor processing systems F DiMeo Jr, PSH Chen, JW Neuner, J Welch, M Stawasz, TH Baum, ... US Patent 7,080,545, 2006 | 396 | 2006 |
| Apparatus and process for sensing fluoro species in semiconductor processing systems F DiMeo Jr, PSH Chen, JW Neuner, J Welch, M Stawasz, TH Baum, ... US Patent 8,109,130, 2012 | 382 | 2012 |
| Apparatus and process for sensing fluoro species in semiconductor processing systems F DiMeo Jr, PSH Chen, JW Neuner, J Welch, M Stawasz, TH Baum, ... US Patent 7,296,460, 2007 | 372 | 2007 |
| Digital chemical vapor deposition (CVD) method for forming a multi-component oxide layer F DiMeo Jr, SM Bilodeau, PC Van Buskirk US Patent 5,972,430, 1999 | 314 | 1999 |
| MEMS-based hydrogen gas sensors F DiMeo Jr, S Chen, P Chen, J Neuner, A Roerhl, J Welch Sensors and Actuators B: Chemical 117 (1), 10-16, 2006 | 91 | 2006 |
| Micro-machined thin film sensor arrays for the detection of H2 containing gases, and method of making and using the same F DiMeo Jr, TH Baum US Patent 6,596,236, 2003 | 89 | 2003 |
| Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers KG Kreider, F DiMeo Sensors and Actuators A: Physical 69 (1), 46-52, 1998 | 86 | 1998 |
| Cleaning of semiconductor processing systems F Dimeo, J Dietz, WK Olander, R Kaim, S Bishop, JW Neuner, J Arno, ... US Patent 8,603,252, 2013 | 79 | 2013 |
| Cleaning of semiconductor processing systems F Dimeo, J Dietz, WK Olander, R Kaim, S Bishop, JW Neuner, J Arno, ... US Patent 8,603,252, 2013 | 79 | 2013 |
| Micro-machined thin film hydrogen gas sensor, and method of making and using the same F DiMeo Jr, G Bhandari US Patent 6,265,222, 2001 | 69 | 2001 |
| Isotropic dry cleaning process for noble metal integrated circuit structures PC Van Buskirk, F DiMeo Jr, PC Kirlin, TH Baum US Patent 6,254,792, 2001 | 65 | 2001 |
| Method for etch fabrication of iridium-based electrode structures TH Baum, F DiMeo Jr US Patent 6,143,191, 2000 | 55 | 2000 |
| Nanoporous articles and methods of making same JD Carruthers, F DiMeo Jr, B Bobita US Patent 7,862,646, 2011 | 44 | 2011 |
| Nanoporous articles and methods of making same JD Carruthers, F DiMeo Jr, B Bobita US Patent 7,862,646, 2011 | 44 | 2011 |
| Featured article: use of microhotplates in the controlled growth and characterization of metal oxides for chemical sensing RE Cavicchi, S Semancik, F DiMeo, CJ Taylor Journal of Electroceramics 9, 155-164, 2002 | 43 | 2002 |
| Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel J Dietz, SE Bishop, JV McManus, SM Lurcott, MJ Wodjenski, R Kaim, ... US Patent 7,966,879, 2011 | 41 | 2011 |
| Fluid storage and dispensing system including dynamic fluid monitoring of fluid storage and dispensing vessel J Dietz, SE Bishop, JV McManus, SM Lurcott, MJ Wodjenski, R Kaim, ... US Patent 7,966,879, 2011 | 41 | 2011 |
| Methods for cleaning ion implanter components F DiMeo Jr, J Dietz, WK Olander, R Kaim, SE Bishop, JW Neuner, JI Arno US Patent 7,819,981, 2010 | 34 | 2010 |
| Methods for cleaning ion implanter components F DiMeo Jr, J Dietz, WK Olander, R Kaim, SE Bishop, JW Neuner, JI Arno US Patent 7,819,981, 2010 | 34 | 2010 |
| Chemical sensor responsive to change in volume of material exposed to target particle S Chen, F DiMeo US Patent App. 10/429,909, 2004 | 32 | 2004 |
Richard E CavicchiNational Institute of Standards and Technology (NIST)Verified email at nist.gov
