Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation YF Lu, L Zhang, WD Song, YW Zheng, BS Luk’Yanchuk Journal of Experimental and Theoretical Physics Letters 72, 457-459, 2000 | 173 | 2000 |
Pulsed laser-assisted surface structuring with optical near-field enhanced effects SM Huang, MH Hong, BS Luk’Yanchuk, YW Zheng, WD Song, YF Lu, ... Journal of Applied Physics 92 (5), 2495-2500, 2002 | 138 | 2002 |
Laser cleaning: optical physics, applied physics and materials science B Luk'yanchuk World Scientific, 2002 | 136 | 2002 |
Laser cleaning of solid surface: optical resonance and near-field effects BS Luk'yanchuk, YW Zheng, Y Lu High-Power Laser Ablation III 4065, 576-587, 2000 | 134 | 2000 |
Dry laser cleaning of particles from solid substrates: experiments and theory YW Zheng, BS Luk’Yanchuk, YF Lu, WD Song, ZH Mai Journal of Applied Physics 90 (5), 2135-2142, 2001 | 129 | 2001 |
Laser induced removal of spherical particles from silicon wafers YF Lu, YW Zheng, WD Song Journal of Applied Physics 87 (3), 1534-1539, 2000 | 96 | 2000 |
Nanostructure fabrication using pulsed lasers in combination with a scanning tunneling microscope: Mechanism investigation YF Lu, ZH Mai, YW Zheng, WD Song Applied Physics Letters 76 (9), 1200-1202, 2000 | 62 | 2000 |
Laser surface cleaning and potential applications in disk drive industry YF Lu, WD Song, MH Hong, YW Zheng, TC Chong Tribology International 33 (5-6), 329-335, 2000 | 49 | 2000 |
An energy approach to the modelling of particle removal by pulsed laser irradiation YF Lu, YW Zheng, WD Song Applied Physics A 68, 569-572, 1999 | 46 | 1999 |
Laser surface cleaning and real-time monitoring Y Lu, WD Song, HM Hong, YW Zheng ALT'99 International Conference on Advanced Laser Technologies 4070, 331-337, 2000 | 29 | 2000 |
Characterization of ejected particles during laser cleaning YF Lu, YW Zheng, WD Song Journal of Applied Physics 87 (1), 549-552, 2000 | 26 | 2000 |
New mechanism of laser dry cleaning BS Luk'yanchuk, YW Zheng, Y Lu Nonresonant Laser-Matter Interaction (NLMI-10) 4423, 115-126, 2001 | 22 | 2001 |
Laser-induced removal of plate-like particles from solid surfaces WD Song, MH Hong, HL Koh, WJ Wang, YW Zheng, YF Lu, TC Chong Applied surface science 186 (1-4), 69-74, 2002 | 19 | 2002 |
Basic physical problems related to dry laser cleaning BS Luk yanchuk, YW Zheng, YF Lu RIKEN REVIEW, 28-34, 2002 | 17 | 2002 |
Angular effect in laser removal of spherical silica particles from silicon wafers YW Zheng, YF Lu, WD Song Journal of Applied Physics 90 (1), 59-63, 2001 | 15 | 2001 |
Laser removal of particles from solid surfaces YF Lu, WD Song, L Zhang, B Luk’Yanchuyk, YW Zheng, WJ Wang, ... Particles on Surfaces: Detection, Adhesion and Removal, Volume 7, 261-273, 2023 | 14 | 2023 |
Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser YW Zheng, YF Lu, ZH Mai, WD Song Japanese Journal of Applied Physics 39 (10R), 5894, 2000 | 14 | 2000 |
Biased deep trench isolation Y Zheng, G Chen, D Mao, DH Tai, Y Ma US Patent 9,806,117, 2017 | 9 | 2017 |
Conductive trench isolation Y Zheng, G Chen, D Mao, DH Tai, CW Hsiung, A Kumar US Patent 9,111,993, 2015 | 9 | 2015 |
Optical resonance and near-field effects in dry laser cleaning BS Luk'yanchuk, M Mosbacher, YW Zheng, HJ Münzer, SM Huang, ... Laser Cleaning, 103-178, 2002 | 9 | 2002 |