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Yuanwei Zheng
Yuanwei Zheng
Ph.D
Verified email at ovt.com
Title
Cited by
Cited by
Year
Laser writing of a subwavelength structure on silicon (100) surfaces with particle-enhanced optical irradiation
YF Lu, L Zhang, WD Song, YW Zheng, BS Luk’Yanchuk
Journal of Experimental and Theoretical Physics Letters 72, 457-459, 2000
1732000
Pulsed laser-assisted surface structuring with optical near-field enhanced effects
SM Huang, MH Hong, BS Luk’Yanchuk, YW Zheng, WD Song, YF Lu, ...
Journal of Applied Physics 92 (5), 2495-2500, 2002
1382002
Laser cleaning: optical physics, applied physics and materials science
B Luk'yanchuk
World Scientific, 2002
1362002
Laser cleaning of solid surface: optical resonance and near-field effects
BS Luk'yanchuk, YW Zheng, Y Lu
High-Power Laser Ablation III 4065, 576-587, 2000
1342000
Dry laser cleaning of particles from solid substrates: experiments and theory
YW Zheng, BS Luk’Yanchuk, YF Lu, WD Song, ZH Mai
Journal of Applied Physics 90 (5), 2135-2142, 2001
1292001
Laser induced removal of spherical particles from silicon wafers
YF Lu, YW Zheng, WD Song
Journal of Applied Physics 87 (3), 1534-1539, 2000
962000
Nanostructure fabrication using pulsed lasers in combination with a scanning tunneling microscope: Mechanism investigation
YF Lu, ZH Mai, YW Zheng, WD Song
Applied Physics Letters 76 (9), 1200-1202, 2000
622000
Laser surface cleaning and potential applications in disk drive industry
YF Lu, WD Song, MH Hong, YW Zheng, TC Chong
Tribology International 33 (5-6), 329-335, 2000
492000
An energy approach to the modelling of particle removal by pulsed laser irradiation
YF Lu, YW Zheng, WD Song
Applied Physics A 68, 569-572, 1999
461999
Laser surface cleaning and real-time monitoring
Y Lu, WD Song, HM Hong, YW Zheng
ALT'99 International Conference on Advanced Laser Technologies 4070, 331-337, 2000
292000
Characterization of ejected particles during laser cleaning
YF Lu, YW Zheng, WD Song
Journal of Applied Physics 87 (1), 549-552, 2000
262000
New mechanism of laser dry cleaning
BS Luk'yanchuk, YW Zheng, Y Lu
Nonresonant Laser-Matter Interaction (NLMI-10) 4423, 115-126, 2001
222001
Laser-induced removal of plate-like particles from solid surfaces
WD Song, MH Hong, HL Koh, WJ Wang, YW Zheng, YF Lu, TC Chong
Applied surface science 186 (1-4), 69-74, 2002
192002
Basic physical problems related to dry laser cleaning
BS Luk yanchuk, YW Zheng, YF Lu
RIKEN REVIEW, 28-34, 2002
172002
Angular effect in laser removal of spherical silica particles from silicon wafers
YW Zheng, YF Lu, WD Song
Journal of Applied Physics 90 (1), 59-63, 2001
152001
Laser removal of particles from solid surfaces
YF Lu, WD Song, L Zhang, B Luk’Yanchuyk, YW Zheng, WJ Wang, ...
Particles on Surfaces: Detection, Adhesion and Removal, Volume 7, 261-273, 2023
142023
Removing spherical silica particles from Si, Ge and NiP substrates by KrF excimer laser
YW Zheng, YF Lu, ZH Mai, WD Song
Japanese Journal of Applied Physics 39 (10R), 5894, 2000
142000
Biased deep trench isolation
Y Zheng, G Chen, D Mao, DH Tai, Y Ma
US Patent 9,806,117, 2017
92017
Conductive trench isolation
Y Zheng, G Chen, D Mao, DH Tai, CW Hsiung, A Kumar
US Patent 9,111,993, 2015
92015
Optical resonance and near-field effects in dry laser cleaning
BS Luk'yanchuk, M Mosbacher, YW Zheng, HJ Münzer, SM Huang, ...
Laser Cleaning, 103-178, 2002
92002
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