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Ethem Erkan Aktakka
Ethem Erkan Aktakka
Assistant Research Scientist, University of Michigan
Verified email at umich.edu - Homepage
Title
Cited by
Cited by
Year
A Micro Inertial Energy Harvesting Platform With Self-Supplied Power Management Circuit for Autonomous Wireless Sensor Nodes
EE Aktakka, K Najafi
IEEE Journal of Solid State Circuits 49, 1-13, 2014
2172014
A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations
T Galchev, EE Aktakka, K Najafi
IEEE/ASME Journal of Microelectromechanical Systems 21, 1311-1320, 2012
1432012
Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting
EE Aktakka, RL Peterson, K Najafi
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
1362011
Microsystems for energy harvesting
K Najafi, T Galchev, EE Aktakka, RL Peterson, J McCullagh
2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011
982011
Energy scavenging from insect flight
EE Aktakka, H Kim, K Najafi
Journal of Micromechanics and Microengineering 21 (9), 095016, 2011
822011
A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon
EE Aktakka, RL Peterson, K Najafi
2010 International Electron Devices Meeting, 31.5. 1-31.5. 4, 2010
712010
A self-supplied inertial piezoelectric energy harvester with power-management IC
EE Aktakka, RL Peterson, K Najafi
2011 IEEE International Solid-State Circuits Conference, 120-121, 2011
692011
Wafer-level integration of high-quality bulk piezoelectric ceramics on silicon
EE Aktakka, RL Peterson, K Najafi
IEEE transactions on electron devices 60 (6), 2022-2030, 2013
492013
A piezoelectric frequency-increased power generator for scavenging low-frequency ambient vibration
T Galchev, EE Aktakka, H Kim, K Najafi
2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010
492010
A Microactuation and Sensing Platform With Active Lockdown for In Situ Calibration of Scale Factor Drifts in Dual-Axis Gyroscopes
EE Aktakka, JW Woo, D Egert, RJM Gordenker, K Najafi
Transactions on Mechatronics 20, 934-943, 2015
482015
A 3-DOF Piezoelectric Micro Vibratory Stage based on Bulk-PZT/Silicon Crab-Leg Suspensions
EE Aktakka, RL Peterson, K Najafi
26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS …, 2013
342013
On-chip capacitive sensing and tilting motion estimation of a micro-stage for in situ MEMS gyroscope calibration
Y Chen, EE Aktakka, JK Woo, K Najafi, KR Oldham
Mechatronics 56, 242-253, 2018
322018
Three-Axis Piezoelectric Vibration Energy Harvester
EE Aktakka, K Najafi
28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS …, 2015
322015
Wafer level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substrates
EE Aktakka, H Kim, K Najafi
TRANSDUCERS 2009-2009 International Solid-State Sensors, Actuators and …, 2009
302009
A six-axis micro platform for in situ calibration of MEMS inertial sensors
EE Aktakka, K Najafi
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems …, 2016
272016
Actuation and sensing platform for sensor calibration and vibration isolation
K Najafi, E Aktakka
US Patent 9,874,459, 2018
242018
Post-CMOS FinFET Integration of Bismuth Telluride and Antimony Telluride Thin-Film-Based Thermoelectric Devices on SoI Substrate
EE Aktakka, N Ghafouri, CE Smith, RL Peterson, MM Hussain, K Najafi
Electron Device Letters 34, 1334-1336, 2013
202013
Estimation With Threshold Sensing for Gyroscope Calibration Using a Piezoelectric Microstage
B Edamana, Y Chen, D Slavin, EE Aktakka, KR Oldham
Transactions on Control Systems Technology, 2015
192015
High Stroke and High Deflection Bulk-PZT Diaphragm and Cantilever Micro Actuators and Effect of Pre-Stress on Device Performance
EE Aktakka, RL Peterson, K Najafi
IEEE/ASME Journal of Microelectromechanical Systems, 1-1, 2013
182013
Mechanical Energy Scavenging From Flying Insects
EE Aktakka, H Kim, M Atashbar, K Najafi
Solid- State Sensors, Actuators, and Microsystems Workshop (Hilton Head 2008 …, 2008
182008
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