| Silicon migration of through-holes in single- and poly-crystalline silicon membranes J Stehle, VA Hong, A Feyh, GJO Brien, G Yama, O Ambacher, B Kim, ... Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head 2014 …, 2014 | 11 | 2014 |
| Capacitive Sensor Fusion: Co-fabricated x/y and z-axis Accelerometers, Pressure Sensor, Thermometer VA Hong, J Stehle, CH Ahn, DB Heinz, G Yama, B Kim, GJ O'Brien, ... IEEE Transducers Conference, Anchorage, Alaska, USA, 2015 | 8 | 2015 |
| Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices DB Heinz, VA Hong, TS Kimbrell, J Stehle, CH Ahn, EJ Ng, Y Yang, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 8 | 2015 |
| Development of a silicon-only capacitive dew point sensor J Stehle, AK Samarao, G Yama, U Krishnamoorthy, O Ambacher IEEE Sensors Journal 17 (22), 7223-7230, 2017 | 5 | 2017 |
| Study of a silicon parallel plate capacitor as a dew point sensor J Stehle, O Ambacher, A Samarao, G Yama, U Krishnamoorthy 2016 IEEE SENSORS, 1-3, 2016 | 5 | 2016 |
| Phased Array for Detecting Artery Location to Measure Blood Velocity A Duerr, T Rocznik, C Peters, J Stehle US Patent App. 15/283,221, 2018 | 2 | 2018 |
| Single piezoelectric transmitter and receiver to detect blood velocities A Duerr, T Rocznik, C Peters, J Stehle US Patent App. 15/283,218, 2018 | 2 | 2018 |
| Combined mimo array and phased array for blood velocity detection A Duerr, T Rocznik, C Peters, J Stehle US Patent App. 15/283,228, 2018 | 1 | 2018 |
| Atomic layer deposited P-type nickel oxide and cobalt oxide for ethanol gas sensing J Stehle, AK Samarao, U Krishnamoorthy, O Ambacher 2017 19th International Conference on Solid-State Sensors, Actuators and …, 2017 | 1 | 2017 |
| Single piezoelectric transmitter and receiver to detect blood velocities A Duerr, T Rocznik, C Peters, J Stehle US Patent 11,717,254, 2023 | | 2023 |
| Micro-mechanical adjustment system for piezoelectric transducers A Duerr, T Rocznik, C Peters, J Stehle US Patent 10,856,837, 2020 | | 2020 |
| System and method for maintaining a smoothed and anti-stiction surface on a MEMS device J Stehle, G Yama US Patent 10,501,314, 2019 | | 2019 |
| System and method for maintaining a smoothed surface on a MEMS device J Stehle, G Yama US Patent 10,494,253, 2019 | | 2019 |
| MEMS gas chromatograph and method of forming a separator column for a MEMS gas chromatograph A Feyh, G O'brien, B Kim, J Stehle US Patent 10,060,888, 2018 | | 2018 |
| SPECIAL ISSUE ON SELECTED PAPERS FROM THE IEEE SENSORS 2016 CONFERENCE J Stehle, AK Samarao, G Yama, U Krishnamoorthy, O Ambacher, ... | | |
Oliver AmbacherGips-Schüle-Professur für Leistungselektronik, Universität FreiburgVerified email at inatech.uni-freiburg.de
