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Lado Filipovic
Lado Filipovic
Institute for Microelectronics, TU Wien
Verified email at iue.tuwien.ac.at - Homepage
Title
Cited by
Cited by
Year
Modeling spray pyrolysis deposition
L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ...
Proceedings of the world congress on engineering 2, 987-992, 2013
672013
Performance and stress analysis of metal oxide films for CMOS-integrated gas sensors
L Filipovic, S Selberherr
Sensors 15 (4), 7206-7227, 2015
602015
Methods of simulating thin film deposition using spray pyrolysis techniques
L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ...
Microelectronic Engineering 117, 57-66, 2014
582014
Modeling and simulation of novel semiconducting metal oxide gas sensors for wearable devices
A Lahlalia, L Filipovic, S Selberherr
IEEE Sensors Journal 18 (5), 1960-1970, 2018
312018
Topography simulation of novel processing techniques
L Filipovic
292012
System-on-chip SMO gas sensor integration in advanced CMOS technology
L Filipovic, A Lahlalia
Journal of The Electrochemical Society 165 (16), B862, 2018
222018
A method for simulating spray pyrolysis deposition in the level set framework
L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ...
Eng. Lett 21 (4), 224-240, 2013
222013
Modeling of gate stack patterning for advanced technology nodes: A review
X Klemenschits, S Selberherr, L Filipovic
Micromachines 9 (12), 631, 2018
212018
Electro-thermal simulation & characterization of a microheater for SMO gas sensors
A Lahlalia, O Le Neel, R Shankar, SY Kam, L Filipovic
Journal of Microelectromechanical Systems 27 (3), 529-537, 2018
182018
Thermo-electro-mechanical simulation of semiconductor metal oxide gas sensors
L Filipovic, S Selberherr
Materials 12 (15), 2410, 2019
162019
Modeling the growth of tin dioxide using spray pyrolysis deposition for gas sensor applications
L Filipovic, S Selberherr, GC Mutinati, E Brunet, S Steinhauer, A Köck, ...
IEEE transactions on semiconductor manufacturing 27 (2), 269-277, 2014
152014
Improved sensing capability of integrated semiconducting metal oxide gas sensor devices
A Lahlalia, O Le Neel, R Shankar, S Selberherr, L Filipovic
Sensors 19 (2), 374, 2019
142019
Three-dimensional simulation of focused ion beam processing using the level set method
O Ertl, L Filipović, S Selberherr
2010 International Conference on Simulation of Semiconductor Processes and …, 2010
142010
Intrinsic stress analysis of tungsten-lined open TSVs
L Filipovic, AP Singulani, F Roger, S Carniello, S Selberherr
Microelectronics Reliability 55 (9-10), 1843-1848, 2015
122015
The effects of etching and deposition on the performance and stress evolution of open through silicon vias
L Filipovic, S Selberherr
Microelectronics Reliability 54 (9-10), 1953-1958, 2014
112014
Monte Carlo Methods and Applications: Proceedings of the 8th IMACS Seminar on Monte Carlo Methods, August 29–September 2, 2011, Borovets, Bulgaria
E Alba, D Angelova, M Angelova, S Artemchuk, E Atanassov, K Atanassov, ...
Walter de Gruyter, 2012
112012
A method for simulating the influence of grain boundaries and material interfaces on electromigration
L Filipovic
Microelectronics Reliability 97, 38-52, 2019
102019
Electro-thermal-mechanical modeling of gas sensor hotplates
R Coppeta, A Lahlalia, D Kozic, R Hammer, J Riedler, G Toschkoff, ...
Sensor Systems Simulations, 17-72, 2020
82020
Global statistical methodology for the analysis of equipment parameter effects on TSV formation
F Roger, A Singulani, S Carniello, L Filipovic, S Selberherr
2015 International Workshop on CMOS Variability (VARI), 39-44, 2015
82015
Coupled simulation to determine the impact of across wafer variations in oxide PECVD on electrical and reliability parameters of through-silicon vias
E Baer, P Evanschitzky, J Lorenz, F Roger, R Minixhofer, L Filipovic, ...
Microelectronic Engineering 137, 141-145, 2015
82015
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