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Alfred Grill
Alfred Grill
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Cited by
Cited by
Year
100-GHz transistors from wafer-scale epitaxial graphene
YM Lin, C Dimitrakopoulos, KA Jenkins, DB Farmer, HY Chiu, A Grill, ...
Science 327 (5966), 662-662, 2010
31612010
Diamond-like carbon: state of the art
A Grill
Diamond and related materials 8 (2-5), 428-434, 1999
12981999
Cold plasma in materials fabrication
A Grill
IEEE Press, New York, 1994
11261994
Wafer-scale graphene integrated circuit
YM Lin, A Valdes-Garcia, SJ Han, DB Farmer, I Meric, Y Sun, Y Wu, ...
Science 332 (6035), 1294-1297, 2011
10842011
Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization
A Grill, DA Neumayer
Journal of applied physics 94 (10), 6697-6707, 2003
7822003
Tribology of diamondlike carbon and related materials: an updated review
A Grill
Surface and Coatings Technology 94, 507-513, 1997
6151997
Diamond-like carbon coatings as biocompatible materials—an overview
A Grill
Diamond and related materials 12 (2), 166-170, 2003
5472003
Hydrogenated oxidized silicon carbon material
A Grill, CV Jahnes, VV Patel, LC Perraud
US Patent 6,147,009, 2000
5122000
Review of the tribology of diamond-like carbon
A Grill
Wear 168 (1-2), 143-153, 1993
4411993
Transferable device-containing layer for silicon-on-insulator applications
JO Chu, A Grill, DA Herman Jr, KL Saenger
US Patent 6,774,010, 2004
3582004
Multi component dielectric layer
SM Gates, A Grill, S Van Nguyen, SV Nitta
US Patent 8,357,608, 2013
3492013
Ultralow- dielectrics prepared by plasma-enhanced chemical vapor deposition
A Grill, V Patel
Applied Physics Letters 79 (6), 803-805, 2001
3412001
Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made
SM Gates, A Grill, DR Medeiros, D Neumayer, S Van Nguyen, VV Patel, ...
US Patent 7,049,247, 2006
3392006
SiCOH dielectric
A Afzali-Ardakani, S Gates, A Grill, D Neumayer, S Nguyen, V Patel
US Patent App. 11/336,726, 2007
3192007
Strained Si NMOSFETs for high performance CMOS technology
K Rim, S Koester, M Hargrove, J Chu, PM Mooney, J Ott, T Kanarsky, ...
2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001
3152001
Friction control of diamond-like carbon coatings
C Donnet, A Grill
Surface and Coatings Technology 94, 456-462, 1997
3101997
Electrical and optical properties of diamond-like carbon
A Grill
Thin solid films 355, 189-193, 1999
3051999
Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials
A Grill
Journal of Applied Physics 93 (3), 1785-1790, 2003
2832003
Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane
A Grill, V Patel
Journal of applied physics 85 (6), 3314-3318, 1999
2631999
Plating of noble metal electrodes for DRAM and FRAM
PC Andricacos, JH Comfort, A Grill, DE Kotecki, VV Patel, KL Saenger, ...
US Patent 5,789,320, 1998
2621998
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