| 100-GHz transistors from wafer-scale epitaxial graphene YM Lin, C Dimitrakopoulos, KA Jenkins, DB Farmer, HY Chiu, A Grill, ... Science 327 (5966), 662-662, 2010 | 3161 | 2010 |
| Diamond-like carbon: state of the art A Grill Diamond and related materials 8 (2-5), 428-434, 1999 | 1298 | 1999 |
| Cold plasma in materials fabrication A Grill IEEE Press, New York, 1994 | 1126 | 1994 |
| Wafer-scale graphene integrated circuit YM Lin, A Valdes-Garcia, SJ Han, DB Farmer, I Meric, Y Sun, Y Wu, ... Science 332 (6035), 1294-1297, 2011 | 1084 | 2011 |
| Structure of low dielectric constant to extreme low dielectric constant SiCOH films: Fourier transform infrared spectroscopy characterization A Grill, DA Neumayer Journal of applied physics 94 (10), 6697-6707, 2003 | 782 | 2003 |
| Tribology of diamondlike carbon and related materials: an updated review A Grill Surface and Coatings Technology 94, 507-513, 1997 | 615 | 1997 |
| Diamond-like carbon coatings as biocompatible materials—an overview A Grill Diamond and related materials 12 (2), 166-170, 2003 | 547 | 2003 |
| Hydrogenated oxidized silicon carbon material A Grill, CV Jahnes, VV Patel, LC Perraud US Patent 6,147,009, 2000 | 512 | 2000 |
| Review of the tribology of diamond-like carbon A Grill Wear 168 (1-2), 143-153, 1993 | 441 | 1993 |
| Transferable device-containing layer for silicon-on-insulator applications JO Chu, A Grill, DA Herman Jr, KL Saenger US Patent 6,774,010, 2004 | 358 | 2004 |
| Multi component dielectric layer SM Gates, A Grill, S Van Nguyen, SV Nitta US Patent 8,357,608, 2013 | 349 | 2013 |
| Ultralow- dielectrics prepared by plasma-enhanced chemical vapor deposition A Grill, V Patel Applied Physics Letters 79 (6), 803-805, 2001 | 341 | 2001 |
| Method for fabricating an ultralow dielectric constant material as an intralevel or interlevel dielectric in a semiconductor device and electronic device made SM Gates, A Grill, DR Medeiros, D Neumayer, S Van Nguyen, VV Patel, ... US Patent 7,049,247, 2006 | 339 | 2006 |
| SiCOH dielectric A Afzali-Ardakani, S Gates, A Grill, D Neumayer, S Nguyen, V Patel US Patent App. 11/336,726, 2007 | 319 | 2007 |
| Strained Si NMOSFETs for high performance CMOS technology K Rim, S Koester, M Hargrove, J Chu, PM Mooney, J Ott, T Kanarsky, ... 2001 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No …, 2001 | 315 | 2001 |
| Friction control of diamond-like carbon coatings C Donnet, A Grill Surface and Coatings Technology 94, 456-462, 1997 | 310 | 1997 |
| Electrical and optical properties of diamond-like carbon A Grill Thin solid films 355, 189-193, 1999 | 305 | 1999 |
| Plasma enhanced chemical vapor deposited SiCOH dielectrics: from low-k to extreme low-k interconnect materials A Grill Journal of Applied Physics 93 (3), 1785-1790, 2003 | 283 | 2003 |
| Low dielectric constant films prepared by plasma-enhanced chemical vapor deposition from tetramethylsilane A Grill, V Patel Journal of applied physics 85 (6), 3314-3318, 1999 | 263 | 1999 |
| Plating of noble metal electrodes for DRAM and FRAM PC Andricacos, JH Comfort, A Grill, DE Kotecki, VV Patel, KL Saenger, ... US Patent 5,789,320, 1998 | 262 | 1998 |
