| Low-temperature plasma-enhanced atomic layer deposition of 2-D MoS 2: large area, thickness control and tuneable morphology A Sharma, MA Verheijen, L Wu, S Karwal, V Vandalon, HCM Knoops, ... Nanoscale 10 (18), 8615-8627, 2018 | 113 | 2018 |
| Tuning material properties of oxides and nitrides by substrate biasing during plasma-enhanced atomic layer deposition on planar and 3D substrate topographies T Faraz, HCM Knoops, MA Verheijen, CAA Van Helvoirt, S Karwal, ... ACS applied materials & interfaces 10 (15), 13158-13180, 2018 | 106 | 2018 |
| Low-Temperature Plasma-Assisted Atomic-Layer-Deposited SnO2 as an Electron Transport Layer in Planar Perovskite Solar Cells Y Kuang, V Zardetto, R van Gils, S Karwal, D Koushik, MA Verheijen, ... ACS applied materials & interfaces 10 (36), 30367-30378, 2018 | 101 | 2018 |
| Energetic ions during plasma-enhanced atomic layer deposition and their role in tailoring material properties T Faraz, K Arts, S Karwal, HCM Knoops, WMM Kessels Plasma Sources Science and Technology 28 (2), 024002, 2019 | 75 | 2019 |
| InSbAs two-dimensional electron gases as a platform for topological superconductivity CM Moehle, CT Ke, Q Wang, C Thomas, D Xiao, S Karwal, M Lodari, ... Nano Letters 21 (23), 9990-9996, 2021 | 37 | 2021 |
| Low resistivity HfN x grown by plasma-assisted ALD with external rf substrate biasing S Karwal, MA Verheijen, BL Williams, T Faraz, WMM Kessels, M Creatore Journal of Materials Chemistry C 6 (15), 3917-3926, 2018 | 35 | 2018 |
| Cu-based nanoalloys in the base-free Ullmann heterocyle-aryl ether synthesis V Engels, F Benaskar, N Patil, EV Rebrov, V Hessel, LA Hulshof, ... Organic Process Research & Development 14 (3), 644-649, 2010 | 32 | 2010 |
| Exploring Pore Formation of Atomic Layer-Deposited Overlayers by in Situ Small- and Wide-Angle X-ray Scattering T Li, S Karwal, B Aoun, H Zhao, Y Ren, CP Canlas, JW Elam, RE Winans Chemistry of Materials 28 (19), 7082-7087, 2016 | 27 | 2016 |
| Tailoring nanopore formation in atomic layer deposited ultrathin films S Karwal, T Li, A Yanguas-Gil, CP Canlas, Y Lei, AU Mane, JA Libera, ... Journal of Vacuum Science & Technology A 36 (1), 2018 | 21 | 2018 |
| Controlled release from protein particles encapsulated by molecular layer deposition SA Vasudevan, Y Xu, S Karwal, HGME van Ostaay, GMH Meesters, ... Chemical communications 51 (63), 12540-12543, 2015 | 19 | 2015 |
| Plasma-Assisted ALD of Highly Conductive HfNx: On the Effect of Energetic Ions on Film Microstructure S Karwal, MA Verheijen, K Arts, T Faraz, WMM Kessels, M Creatore Plasma Chemistry and Plasma Processing 40, 697-712, 2020 | 18 | 2020 |
| Electrical control of uniformity in quantum dot devices M Meyer, C Déprez, TR van Abswoude, IN Meijer, D Liu, CA Wang, ... Nano Letters 23 (7), 2522-2529, 2023 | 16 | 2023 |
| Quantum Dots in an Two-Dimensional Electron Gas I Kulesh, CT Ke, C Thomas, S Karwal, CM Moehle, S Metti, R Kallaher, ... Physical Review Applied 13 (4), 041003, 2020 | 13 | 2020 |
| Plasma-assisted atomic layer deposition of HfNx: Tailoring the film properties by the plasma gas composition S Karwal, BL Williams, JP Niemelä, MA Verheijen, WMM Kessels, ... Journal of Vacuum Science & Technology A 35 (1), 2017 | 13 | 2017 |
| Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions S Karwal, B Karasulu, HCM Knoops, V Vandalon, WMM Kessels, ... Nanoscale 13 (22), 10092-10099, 2021 | 9 | 2021 |
| Low disorder and high valley splitting in silicon D Degli Esposti, LEA Stehouwer, Ö Gül, N Samkharadze, C Déprez, ... npj Quantum Information 10 (1), 32, 2024 | 3 | 2024 |
| Single-electron occupation in quantum dot arrays at selectable plunger gate voltage M Meyer, C Déprez, IN Meijer, FK Unseld, S Karwal, A Sammak, ... Nano Letters 23 (24), 11593-11600, 2023 | 2 | 2023 |
| Low disorder and high valley splitting in silicon DD Esposti, LEA Stehouwer, Ö Gül, N Samkharadze, C Déprez, M Meyer, ... arXiv preprint arXiv:2309.02832, 2023 | 1 | 2023 |
| Oral: Advances in Spin Qubit Devices: Interconnect and Magnet Optimization for Scalability L Tryputen, D Michalak, TJ Willigers, H Amin, S Karwal, S Amitonov, ... Bulletin of the American Physical Society, 2024 | | 2024 |
| A 2x2 Quantum Processor in 28Si/SiGe F Unseld, B Undseth, O Pietx-Casas, M Meyer, S Karwal, S Amitonov, ... Bulletin of the American Physical Society, 2024 | | 2024 |
