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Yunlong Li
Yunlong Li
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Year
Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects
S Masahito, Y Kashiwagi, Y Li, K Arstila, O Richard, DJ Cott, M Heyns, ...
Nanotechnology 22 (8), 085302, 2011
1242011
Influence of absorbed water components on SiOCH low-k reliability
Y Li, I Ciofi, L Carbonell, N Heylen, J Van Aelst, MR Baklanov, ...
Journal of Applied Physics 104 (3), 2008
1042008
Integration and electrical characterization of carbon nanotube via interconnects
Y Li, DJ Cott, S Mertens, N Peys, M Heyns, S De Gendt, G Groeseneken, ...
Microelectronic Engineering 88 (5), 837-843, 2011
772011
Electrical reliability challenges of advanced low-k dielectrics
C Wu, Y Li, MR Baklanov, K Croes
ECS Journal of Solid State Science and Technology 4 (1), N3065, 2014
612014
Low field TDDB of BEOL interconnects using> 40 months of data
K Croes, P Roussel, Y Barbarin, C Wu, Y Li, J Bömmels, Z Tőkei
2013 IEEE International Reliability Physics Symposium (IRPS), 2F. 4.1-2F. 4.8, 2013
442013
Internal photoemission of electrons at interfaces of metals with low-κ insulators
S Shamuilia, VV Afanas’ev, P Somers, A Stesmans, YL Li, Z Tőkei, ...
Applied physics letters 89 (20), 2006
442006
Reliability challenges for copper low-k dielectrics and copper diffusion barriers
Z Tökei, YL Li, GP Beyer
Microelectronics Reliability 45 (9-11), 1436-1442, 2005
402005
Current understanding of BEOL TDDB lifetime models
K Croes, C Wu, D Kocaay, Y Li, P Roussel, J Boemmels, Z Tőkei
ECS Journal of Solid State Science and Technology 4 (1), N3094, 2014
382014
Reliability Challenges Related to TSV Integration and 3-D Stacking.
K Croes, J De Messemaeker, Y Li, W Guo, OV Pedreira, V Cherman, ...
IEEE Des. Test 33 (3), 37-45, 2016
342016
Active-lite interposer for 2.5 & 3D integration
G Hellings, M Scholz, M Detalle, D Velenis, MP de ten Broeck, CR Neve, ...
2015 Symposium on VLSI Circuits (VLSI Circuits), T222-T223, 2015
322015
Small pitch, high aspect ratio via-last TSV module
S Van Huylenbroeck, M Stucchi, Y Li, J Slabbekoorn, N Tutunjyan, ...
2016 IEEE 66th Electronic Components and Technology Conference (ECTC), 43-49, 2016
302016
Electrical characterization method to study barrier integrity in 3D through-silicon vias
YL Li, D Velenis, T Kauerauf, M Stucchi, Y Civale, A Redolfi, K Croes
2012 IEEE 62nd Electronic Components and Technology Conference, 304-308, 2012
262012
Real-time investigation of conduction mechanism with bias stress in silica-based intermetal dielectrics
Y Li, G Groeseneken, K Maex, Z Tokei
IEEE Transactions on Device and Materials Reliability 7 (2), 252-258, 2007
212007
Advanced metallization scheme for 3× 50µm via middle TSV and beyond
S Van Huylenbroeck, Y Li, N Heylen, K Croes, G Beyer, E Beyne, M Brouri, ...
2015 IEEE 65th Electronic Components and Technology Conference (ECTC), 66-72, 2015
202015
Above-IC generic poly-SiGe thin film wafer level packaging and MEM device technology: application to accelerometers
B Guo, L Wen, P Helin, G Claes, A Verbist, R Van Hoof, B Du Bois, ...
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems …, 2011
202011
Impact of barrier integrity on liner reliability in 3D through silicon vias
Y Li, Y Civale, Y Oba, A Cockburn, JH Park, E Beyne, I De Wolf, K Croes
2013 IEEE International Reliability Physics Symposium (IRPS), 5C. 5.1-5C. 5.5, 2013
182013
Layout dependency induced deviation from Poisson area scaling in BEOL dielectric reliability
YL Li, Z Tökei, P Roussel, G Groeseneken, K Maex
Microelectronics Reliability 45 (9-11), 1299-1304, 2005
182005
CMP process optimization for improved compatibility with advanced metal liners
N Heylen, L Yunlong, K Kellens, L Carbonell, H Volders, G Santoro, ...
2010 IEEE International Interconnect Technology Conference, 1-3, 2010
162010
A highly reliable 1× 5μm via-last TSV module
S Van Huylenbroeck, Y Li, J De Vos, G Jamieson, N Tutunjyan, A Miller, ...
2018 IEEE International Interconnect Technology Conference (IITC), 94-96, 2018
132018
Correlation between stress-induced leakage current and dielectric degradation in ultra-porous SiOCH low-k materials
C Wu, Y Li, A Leśniewska, O Varela Pedreira, JF de Marneffe, I Ciofi, ...
Journal of Applied Physics 118 (16), 2015
132015
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