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Todd Christenson
Todd Christenson
HT Micro
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Title
Cited by
Cited by
Year
Thermo-magnetic metal flexure actuators
H Guckel, J Klein, T Christenson, K Skrobis, M Laudon, EG Lovell
Technical Digest IEEE Solid-State Sensor and Actuator Workshop, 73-75, 1992
3291992
Fabrication of micromechanical devices from polysilicon films with smooth surfaces
H Guckel, JJ Sniegowski, TR Christenson, S Mohney, TF Kelly
Sensors and Actuators 20 (1-2), 117-122, 1989
2641989
The application of fine-grained, tensile polysilicon to mechanicaly resonant transducers
H Guckel, JJ Sniegowski, TR Christenson, F Raissi
Sensors and Actuators A: Physical 21 (1-3), 346-351, 1990
2091990
Formation of microstructures using a preformed photoresist sheet
H Guckel, TR Christenson, K Skrobis
US Patent 5,378,583, 1995
1941995
A first functional current excited planar rotational magnetic micromotor
H Guckel, TR Christenson, KJ Skrobis, TS Jung, J Klein, KV Hartojo, ...
[1993] Proceedings IEEE Micro Electro Mechanical Systems, 7-11, 1993
1601993
Fabrication of assembled micromechanical components via deep X-ray lithography
K Guckel, KJ Skrobis, TR Christenson, J Klein, S Han, B Choi, EG Lovell
[1991] Proceedings. IEEE Micro Electro Mechanical Systems, 74-79, 1991
1481991
Microstructural and mechanical properties investigation of electrodeposited and annealed LIGA nickel structures
TE Buchheit, JR Michael, TR Christenson, DA LaVan, SD Leith
Metallurgical and Materials Transactions A 33, 539-554, 2002
1432002
Deep X-ray and UV lithographies for micromechanics
H Guckel, TR Christenson, KJ Skrobis, DD Denton, B Choi, EG Lovell, ...
IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 118-122, 1990
143*1990
Method of manufacturing micromechanical devices
H Guckel, TR Christenson, KJ Skrobis
US Patent 5,206,983, 1993
1321993
Fabrication and testing of the planar magnetic micromotor
H Guckel, KJ Skrobis, TR Christenson, J Klein, S Han, B Choi, EG Lovell, ...
Journal of Micromechanics and Microengineering 1 (3), 135, 1991
1281991
Formation of microstructures using a preformed photoresist sheet
H Guckel, TR Christenson, K Skrobis
US Patent 5,576,147, 1996
951996
EBSD studies on wear-induced subsurface regions in LIGA nickel
SV Prasad, JR Michael, TR Christenson
Scripta Materialia 48 (3), 255-260, 2003
922003
Apparatus and method for fabricating a microbattery
RJ Shul, SH Kravitz, TR Christenson, TE Zipperian, D Ingersoll
US Patent 6,432,577, 2002
782002
Method of producing micromachined differential pressure transducers
H Guckel, TR Christenson
US Patent 5,189,777, 1993
711993
Micromechanics via x‐ray assisted processing
H Guckel, KJ Skrobis, J Klein, TR Christenson
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 12 (4 …, 1994
651994
Performance characteristics of second generation polysilicon resonating beam force transducers
JJ Sniegowski, H Guckel, TR Christenson
IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop, 9-12, 1990
621990
Mechanical and metallographic characterization of LIGA fabricated nickel and 80% Ni-20% Fe permalloy
TR Christenson, TE Buchheit, DT Schmale, RJ Bourcier
MRS Online Proceedings Library (OPL) 518, 185, 1998
601998
Liquid-lens variable-control optics in array microscope
TR Christenson, MR Descour, C Liang, AG Olszak
US Patent 7,755,841, 2010
582010
Metal micromechanisms via deep X-ray lithography, electroplating and assembly
H Guckel, T Christenson, K Skrobis
Journal of Micromechanics and Microengineering 2 (4), 225, 1992
581992
Formation of microstructures using a preformed photoresist sheet
H Guckel, TR Christenson, K Skrobis
US Patent 5,496,668, 1996
571996
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