| A fully packaged piezoelectric switch with lowvoltage actuation and electrostatic hold M Cueff, E Defaÿ, P Rey, G Le Rhun, F Perruchot, C Ferrandon, D Mercier, ... 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems …, 2010 | 26 | 2010 |
| Piezoelectric actuation structure including an integrated piezoresistive strain gauge and its production method M Cueff, E Defay, F Perruchot, P Rey US Patent 8,004,154, 2011 | 25 | 2011 |
| Hermetic wafer-level packaging development for RF MEMS switch C Ferrandon, F Greco, E Lagoutte, P Descours, G Enyedy, M Pellat, ... 3rd Electronics System Integration Technology Conference ESTC, 1-6, 2010 | 22 | 2010 |
| Optimized gradient-free PZT thin films for micro-actuators J Abergel, M Allain, H Michaud, M Cueff, T Ricart, C Dieppedale, ... 2012 IEEE International Ultrasonics Symposium, 972-974, 2012 | 16 | 2012 |
| Phase transitions in [001]-oriented morphotropic PbZr0. 52Ti0. 48O3 thin film deposited onto SrTiO3-buffered Si substrate Y Shi, M Cueff, G Niu, G Le Rhun, B Vilquin, G Saint Girons, R Bachelet, ... Journal of Applied Physics 115 (21), 2014 | 14 | 2014 |
| Influence of the crystallographic orientation of Pb(Zr,Ti)O3 films on the transverse piezoelectric coefficient d31 M Cueff, M Allain, J Abergel, G Le Rhun, M Aïd, E Defay, D Faralli 2011 IEEE International Ultrasonics Symposium, 1948-1951, 2011 | 10 | 2011 |
| PZT piezoelectric coefficient extraction by PZT-actuated micro-beam characterization and modeling F Casset, M Cueff, A Suhm, G Le Rhun, J Abergel, M Allain, C Dieppedale, ... 2012 13th International Thermal, Mechanical and Multi-Physics Simulation and …, 2012 | 8 | 2012 |
| Micro-actionneurs piézoélectriques M Cueff Université de Grenoble, 2011 | 7 | 2011 |
| Piezoelectric membrane actuator design F Casset, M Cueff, E Defay, G Le Rhun, A Suhm, P Ancey, A Devos 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and …, 2011 | 7 | 2011 |
| Integrated metallic gauge in a piezoelectric cantilever M Cueff, E Defaÿ, G Le Rhun, P Rey, F Perruchot, A Suhm, M Aïd Sensors and Actuators A: Physical 172 (1), 148-153, 2011 | 6 | 2011 |
| Optimization of electrodes design for PZT thin-film actuated membranes F Casset, H Michaud, T Ricart, G Le Rhun, M Cueff, J Abergel, P Ancey, ... Procedia Engineering 47, 108-111, 2012 | 1 | 2012 |
| Electrostriction for thin films: an alternative to piezoelectricity? E Defay, M Cueff, G Arndt, NB Hassine 2011 IEEE International Ultrasonics Symposium, 1320-1324, 2011 | 1 | 2011 |
| Phase transitions in [001]-oriented morphotropic PbZr {sub 0.52} Ti {sub 0.48} O {sub 3} thin film deposited onto SrTiO {sub 3}-buffered Si substrate Y Shi, M Cueff, G Le Rhun, E Defay, G Niu, B Vilquin, G Saint Girons, ... Journal of Applied Physics 115 (21), 2014 | | 2014 |
| Electrical component comprising a material with a perovskite structure and optimized electrodes and fabrication process M Cueff, E Defay, G Le Rhun US Patent 8,692,443, 2014 | | 2014 |
| Integrated piezoresistive gauge in a piezoelectric cantilever M Cueff, E Defaÿ, G Le Rhun, P Perruchot, A Suhm, M Aïd Procedia Engineering 5, 1027-1030, 2010 | | 2010 |
