Quantum limit of quality factor in silicon micro and nano mechanical resonators S Ghaffari, SA Chandorkar, S Wang, EJ Ng, CH Ahn, V Hong, Y Yang, ... Scientific reports 3 (1), 3244, 2013 | 162 | 2013 |
Monolithic ultrasound fingerprint sensor X Jiang, Y Lu, HY Tang, JM Tsai, EJ Ng, MJ Daneman, BE Boser, ... Microsystems & nanoengineering 3 (1), 1-8, 2017 | 157 | 2017 |
Ultrasonic fingerprint sensor with transmit beamforming based on a PMUT array bonded to CMOS circuitry X Jiang, HY Tang, Y Lu, EJ Ng, JM Tsai, BE Boser, DA Horsley IEEE transactions on ultrasonics, ferroelectrics, and frequency control 64 …, 2017 | 156 | 2017 |
3-D ultrasonic fingerprint sensor-on-a-chip HY Tang, Y Lu, X Jiang, EJ Ng, JM Tsai, DA Horsley, BE Boser IEEE Journal of Solid-State Circuits 51 (11), 2522-2533, 2016 | 153 | 2016 |
Temperature dependence of the elastic constants of doped silicon EJ Ng, VA Hong, Y Yang, CH Ahn, CLM Everhart, TW Kenny Journal of microelectromechanical systems 24 (3), 730-741, 2014 | 150 | 2014 |
Mode-matching of wineglass mode disk resonator gyroscope in (100) single crystal silicon CH Ahn, EJ Ng, VA Hong, Y Yang, BJ Lee, I Flader, TW Kenny Journal of Microelectromechanical Systems 24 (2), 343-350, 2014 | 137 | 2014 |
Artificial intelligence-enabled caregiving walking stick powered by ultra-low-frequency human motion X Guo, T He, Z Zhang, A Luo, F Wang, EJ Ng, Y Zhu, H Liu, C Lee ACS nano 15 (12), 19054-19069, 2021 | 133 | 2021 |
MEMS resonators for frequency reference and timing applications G Wu, J Xu, EJ Ng, W Chen Journal of Microelectromechanical Systems 29 (5), 1137-1166, 2020 | 121 | 2020 |
Epitaxially-encapsulated polysilicon disk resonator gyroscope S Nitzan, CH Ahn, TH Su, M Li, EJ Ng, S Wang, ZM Yang, G O'brien, ... 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems …, 2013 | 101 | 2013 |
Piezoelectric MEMS—Evolution from sensing technology to diversified applications in the 5G/Internet of Things (IoT) era X Le, Q Shi, P Vachon, EJ Ng, C Lee Journal of Micromechanics and Microengineering 32 (1), 014005, 2021 | 98 | 2021 |
Accurate modeling of quality factor behavior of complex silicon MEMS resonators S Ghaffari, EJ Ng, CH Ahn, Y Yang, S Wang, VA Hong, TW Kenny Journal of Microelectromechanical Systems 24 (2), 276-288, 2014 | 98 | 2014 |
Encapsulated high frequency (235 kHz), high-Q (100 k) disk resonator gyroscope with electrostatic parametric pump CH Ahn, S Nitzan, EJ Ng, VA Hong, Y Yang, T Kimbrell, DA Horsley, ... Applied Physics Letters 105 (24), 2014 | 92 | 2014 |
Direct detection of Akhiezer damping in a silicon MEMS resonator J Rodriguez, SA Chandorkar, CA Watson, GM Glaze, CH Ahn, EJ Ng, ... Scientific reports 9 (1), 2244, 2019 | 89 | 2019 |
100K Q-factor toroidal ring gyroscope implemented in wafer-level epitaxial silicon encapsulation process D Senkal, S Askari, MJ Ahamed, EJ Ng, V Hong, Y Yang, CH Ahn, ... 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems …, 2014 | 87 | 2014 |
A unified epi-seal process for fabrication of high-stability microelectromechanical devices Y Yang, EJ Ng, Y Chen, IB Flader, TW Kenny Journal of Microelectromechanical Systems 25 (3), 489-497, 2016 | 80 | 2016 |
A 7ppm, 6/hr frequency-output MEMS gyroscope II Izyumin, MH Kline, YC Yeh, B Eminoglu, CH Ahn, VA Hong, Y Yang, ... 2015 28th IEEE International Conference on Micro Electro Mechanical Systems …, 2015 | 73 | 2015 |
Disk resonator gyroscope with whole-angle mode operation P Taheri-Tehrani, O Izyumin, I Izyumin, CH Ahn, EJ Ng, VA Hong, Y Yang, ... 2015 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2015 | 67 | 2015 |
Nonlinearity of degenerately doped bulk-mode silicon MEMS resonators Y Yang, EJ Ng, PM Polunin, Y Chen, IB Flader, SW Shaw, MI Dykman, ... Journal of Microelectromechanical Systems 25 (5), 859-869, 2016 | 57 | 2016 |
Stability of silicon microelectromechanical systems resonant thermometers EJ Ng, HK Lee, CH Ahn, R Melamud, TW Kenny IEEE Sensors Journal 13 (3), 987-993, 2012 | 55 | 2012 |
Two-dimensional array of CMOS control elements JC Salvia, MH Perrott, M Voros, NG Eldwin, JML Tsai, N Apte US Patent 10,325,915, 2019 | 49 | 2019 |