Markus Lutz
Markus Lutz
SiTime
Verified email at sitime.com
Title
Cited by
Cited by
Year
Single wafer encapsulation of MEMS devices
RN Candler, WT Park, H Li, G Yama, A Partridge, M Lutz, TW Kenny
IEEE transactions on advanced packaging 26 (3), 227-232, 2003
2272003
Long-term and accelerated life testing of a novel single-wafer vacuum encapsulation for MEMS resonators
RN Candler, MA Hopcroft, B Kim, WT Park, R Melamud, M Agarwal, ...
Journal of Microelectromechanical Systems 15 (6), 1446-1456, 2006
2212006
A precision yaw rate sensor in silicon micromachining
M Lutz, W Golderer, J Gerstenmeier, J Marek, B Maihofer, S Mahler, ...
Proceedings of International Solid State Sensors and Actuators Conference …, 1997
2201997
Rotary speed sensor
M Lutz
US Patent 5,728,936, 1998
1571998
Frequency and/or phase compensated microelectromechanical oscillator
A Partridge, M Lutz
US Patent 6,995,622, 2006
1522006
Method of fabricating microelectromechanical systems and devices having trench isolated contacts
A Partridge, M Lutz, S Kronmueller
US Patent 6,936,491, 2005
1492005
Impact of geometry on thermoelastic dissipation in micromechanical resonant beams
RN Candler, A Duwel, M Varghese, SA Chandorkar, MA Hopcroft, ...
Journal of Microelectromechanical Systems 15 (4), 927-934, 2006
1462006
Microelectromechanical systems and devices having thin film encapsulated mechanical structures
A Partridge, M Lutz, S Kronmueller
US Patent 7,075,160, 2006
1112006
Episeal pressure sensor and method for making an episeal pressure sensor
A Partridge, M Lutz
US Patent 6,928,879, 2005
1062005
Rate-of-rotation sensor
M Lutz
US Patent 5,604,312, 1997
1061997
MEMS oscillators for high volume commercial applications
M Lutz, A Partridge, P Gupta, N Buchan, E Klaassen, J McDonald, ...
TRANSDUCERS 2007-2007 International Solid-State Sensors, Actuators and …, 2007
1012007
Acceleration sensor
M Offenberg, W Buchholtz, M Lutz
US Patent 5,627,317, 1997
1011997
Anti-stiction technique for electromechanical systems and electromechanical device employing same
M Lutz, A Partridge, W Frey, M Ulm, M Metz, B Stark, G Yama
US Patent 7,449,355, 2008
992008
Microelectromechanical systems, and devices having thin film encapsulated mechanical structures
A Partridge, M Lutz, S Kronmueller
US Patent 7,288,824, 2007
972007
Method for adjusting the frequency of a MEMS resonator
M Lutz, A Partridge
US Patent 7,102,467, 2006
942006
Temperature compensation for silicon MEMS resonator
M Lutz, A Partridge
US Patent 6,987,432, 2006
852006
New thin film epitaxial polysilicon encapsulation for piezoresistive accelerometers
A Partridge, AE Rice, TW Kenny, M Lutz
Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro …, 2001
852001
Gap tuning for surface micromachined structures in an epitaxial reactor
A Partridge, M Lutz
US Patent 6,808,953, 2004
832004
Rotational rate sensor with two acceleration sensors
E Zabler, J Wolf, M Lutz
US Patent 5,703,293, 1997
831997
Temperature controlled MEMS resonator and method for controlling resonator frequency
M Lutz, A Partridge
US Patent 7,068,125, 2006
792006
The system can't perform the operation now. Try again later.
Articles 1–20