Volgen
Dr Stelios N. Volkos
Dr Stelios N. Volkos
Onbekend partnerschap
Geen geverifieerd e-mailadres
Titel
Geciteerd door
Geciteerd door
Jaar
Vibrational and electrical properties of hexagonal La2O3 films
G Scarel, A Debernardi, D Tsoutsou, S Spiga, SC Capelli, L Lamagna, ...
Applied Physics Letters 91 (10), 102901, 2007
742007
Germanium-induced stabilization of a very high-k zirconia phase in ZrO2/GeO2 gate stacks
P Tsipas, SN Volkos, A Sotiropoulos, SF Galata, G Mavrou, D Tsoutsou, ...
Applied Physics Letters 93 (8), 2008
712008
Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La2O3 films upon annealing
D Tsoutsou, G Scarel, A Debernardi, SC Capelli, SN Volkos, L Lamagna, ...
Microelectronic Engineering 85 (12), 2411-2413, 2008
552008
Atomic layer deposition of LaxZr1− xO2− δ (x= 0.25) high-k dielectrics for advanced gate stacks
D Tsoutsou, L Lamagna, SN Volkos, A Molle, S Baldovino, S Schamm, ...
Applied Physics Letters 94 (5), 2009
412009
O3-based atomic layer deposition of hexagonal La2O3 films on Si(100) and Ge(100) substrates
L Lamagna, C Wiemer, M Perego, SN Volkos, S Baldovino, D Tsoutsou, ...
Journal of Applied Physics 108 (8), 084108, 2010
402010
Chemical/Structural nanocharacterization and electrical properties of ALD-Grown La2O3∕ Si interfaces for advanced gate stacks
S Schamm, PE Coulon, S Miao, SN Volkos, LH Lu, L Lamagna, C Wiemer, ...
Journal of The Electrochemical Society 156 (1), H1, 2008
382008
The impact of negative-bias-temperature-instability on the carrier generation lifetime of metal-oxynitride-silicon capacitors
SN Volkos, ES Efthymiou, S Bernardini, ID Hawkins, AR Peaker, G Petkos
Journal of Applied Physics 100 (12), 124103, 2006
272006
Reliability degradation of thin HfO2/SiO2 gate stacks by remote RF hydrogen and deuterium plasma treatment
E Efthymiou, S Bernardini, JF Zhang, SN Volkos, B Hamilton, AR Peaker
Thin Solid Films 517 (1), 207-208, 2008
192008
Reliability nano-characterization of thin SiO2 and HfSixOy/SiO2 gate stacks
E Efthymiou, S Bernardini, SN Volkos, B Hamilton, JF Zhang, HJ Uppal, ...
Microelectronic engineering 84 (9-10), 2290-2293, 2007
182007
Chemical and structural properties of atomic layer deposited La2O3 films capped with a thin Al2O3 layer
XL Li, D Tsoutsou, G Scarel, C Wiemer, SC Capelli, SN Volkos, ...
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 27 (2 …, 2009
152009
Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study
HJ Uppal, S Bernardini, E Efthymiou, SN Volkos, A Dimoulas, ...
Materials science in semiconductor processing 11 (5-6), 250-253, 2008
42008
Post-stress/breakdown leakage mechanism in ultrathin high-κ (HfO2)x(SiO2)1-x/SiO2 gate stacks: A nanoscale conductive-Atomic Force Microscopy C-AFM
HJ Uppal, V Markevich, SN Volkos, A Dimoulas, B Hamilton, AR Peaker
MRS Online Proceedings Library Archive 1108, 2008
12008
Extrinsic stacking fault generation related to high–k dielectric growth on a Si substrate
SN Volkos, S Bernardini, N Rigopoulos, ES Efthymiou, ID Hawkins, ...
Microelectronic engineering 84 (9-10), 2374-2377, 2007
2007
Het systeem kan de bewerking nu niet uitvoeren. Probeer het later opnieuw.
Artikelen 1–13