| The use of atomic layer deposition in advanced nanopatterning AJM Mackus, AA Bol, WMM Kessels Nanoscale 6 (19), 10941-10960, 2014 | 249 | 2014 |
| Supported core/shell bimetallic nanoparticles synthesis by atomic layer deposition MJ Weber, AJM Mackus, MA Verheijen, C van der Marel, WMM Kessels Chemistry of Materials 24 (15), 2973-2977, 2012 | 145 | 2012 |
| Remote plasma ALD of platinum and platinum oxide films HCM Knoops, AJM Mackus, ME Donders, MCM Van De Sanden, ... Electrochemical and Solid State Letters 12 (7), G34, 2009 | 139 | 2009 |
| Surface reactions during atomic layer deposition of Pt derived from gas phase infrared spectroscopy WMM Kessels, HCM Knoops, SAF Dielissen, AJM Mackus, ... Applied Physics Letters 95 (1), 013114, 2009 | 135 | 2009 |
| Catalytic combustion and dehydrogenation reactions during atomic layer deposition of platinum AJM Mackus, N Leick, L Baker, WMM Kessels Chemistry of Materials 24 (10), 1752-1761, 2012 | 118 | 2012 |
| Influence of oxygen exposure on the nucleation of platinum atomic layer deposition: consequences for film growth, nanopatterning, and nanoparticle synthesis AJM Mackus, MA Verheijen, N Leick, AA Bol, WMM Kessels Chemistry of Materials 25 (9), 1905-1911, 2013 | 114 | 2013 |
| Nucleation and growth of Pt atomic layer deposition on Al2O3 substrates using (methylcyclopentadienyl)-trimethyl platinum and O2 plasma L Baker, AS Cavanagh, D Seghete, SM George, AJM Mackus, ... Journal of Applied Physics 109 (8), 084333, 2011 | 105 | 2011 |
| From the bottom-up: toward area-selective atomic layer deposition with high selectivity AJM Mackus, MJM Merkx, WMM Kessels Chemistry of Materials 31 (1), 2-12, 2018 | 85 | 2018 |
| Synthesis and in situ characterization of low-resistivity films by remote plasma atomic layer deposition E Langereis, HCM Knoops, AJM Mackus, F Roozeboom, ... Journal of Applied Physics 102 (8), 083517, 2007 | 83 | 2007 |
| Area-Selective Atomic Layer Deposition of SiO2 Using Acetylacetone as a Chemoselective Inhibitor in an ABC-Type Cycle A Mameli, MJM Merkx, B Karasulu, F Roozeboom, WEMM Kessels, ... ACS nano 11 (9), 9303-9311, 2017 | 80 | 2017 |
| Local deposition of high-purity Pt nanostructures by combining electron beam induced deposition and atomic layer deposition AJM Mackus, JJL Mulders, MCM Van De Sanden, WMM Kessels Journal of Applied Physics 107 (11), 116102, 2010 | 79 | 2010 |
| Synthesis of doped, ternary, and quaternary materials by atomic layer deposition: a review AJM Mackus, JR Schneider, C MacIsaac, JG Baker, SF Bent Chemistry of Materials 31 (4), 1142-1183, 2018 | 76 | 2018 |
| Room-temperature atomic layer deposition of platinum AJM Mackus, D Garcia-Alonso, HCM Knoops, AA Bol, WMM Kessels Chemistry of Materials 25 (9), 1769-1774, 2013 | 69 | 2013 |
| Nanopatterning by direct-write atomic layer deposition AJM Mackus, SAF Dielissen, JJL Mulders, WMM Kessels Nanoscale 4 (15), 4477-4480, 2012 | 66 | 2012 |
| Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes AJM Mackus, SBS Heil, E Langereis, HCM Knoops, MCM Van de Sanden, ... Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 28 (1 …, 2010 | 65 | 2010 |
| Atomic Layer Deposition of High-Purity Palladium Films from Pd(hfac)2 and H2 and O2 Plasmas MJ Weber, AJM Mackus, MA Verheijen, V Longo, AA Bol, WMM Kessels The Journal of Physical Chemistry C 118 (16), 8702-8711, 2014 | 55 | 2014 |
| Direct-write atomic layer deposition of high-quality Pt nanostructures: selective growth conditions and seed layer requirements AJM Mackus, NFW Thissen, JJL Mulders, PHF Trompenaars, ... The Journal of Physical Chemistry C 117 (20), 10788-10798, 2013 | 52 | 2013 |
| Area-Selective Atomic Layer Deposition of In2O3:H Using a μ-Plasma Printer for Local Area Activation A Mameli, Y Kuang, M Aghaee, CK Ande, B Karasulu, M Creatore, ... Chemistry of Materials 29 (3), 921-925, 2017 | 38 | 2017 |
| Atomic Layer Deposition of Highly Transparent Platinum Counter Electrodes for Metal/Polymer Flexible Dye‐Sensitized Solar Cells D Garcia‐Alonso, V Zardetto, AJM Mackus, F De Rossi, MA Verheijen, ... Advanced Energy Materials 4 (4), 1300831, 2014 | 31 | 2014 |
| Mass spectrometry study of the temperature dependence of Pt film growth by atomic layer deposition IJM Erkens, AJM Mackus, HCM Knoops, P Smits, THM Van de Ven, ... ECS Journal of Solid State Science and Technology 1 (6), P255, 2012 | 31 | 2012 |
