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H.F.W. Dekkers
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Very low surface recombination velocities on p-type silicon wafers passivated with a dielectric with fixed negative charge
G Agostinelli, A Delabie, P Vitanov, Z Alexieva, HFW Dekkers, S De Wolf, ...
Solar energy materials and solar cells 90 (18-19), 3438-3443, 2006
6082006
Gate-all-around MOSFETs based on vertically stacked horizontal Si nanowires in a replacement metal gate process on bulk Si substrates
H Mertens, R Ritzenthaler, A Hikavyy, MS Kim, Z Tao, K Wostyn, SA Chew, ...
2016 IEEE symposium on VLSI technology, 1-2, 2016
2122016
Vertically stacked gate-all-around Si nanowire CMOS transistors with dual work function metal gates
H Mertens, R Ritzenthaler, A Chasin, T Schram, E Kunnen, A Hikavyy, ...
2016 IEEE International Electron Devices Meeting (IEDM), 19.7. 1-19.7. 4, 2016
1552016
Molecular hydrogen formation in hydrogenated silicon nitride
HFW Dekkers, G Beaucarne, M Hiller, H Charifi, A Slaoui
Applied Physics Letters 89 (21), 2006
1022006
Origin of visible luminescence in hydrogenated amorphous silicon nitride
HL Hao, LK Wu, WZ Shen, HFW Dekkers
Applied Physics Letters 91 (20), 2007
832007
Optical properties and local bonding configurations of hydrogenated amorphous silicon nitride thin films
JJ Mei, H Chen, WZ Shen, HFW Dekkers
Journal of applied physics 100 (7), 2006
822006
Vertically stacked gate-all-around Si nanowire CMOS transistors with reduced vertical nanowires separation, new work function metal gate solutions, and DC/AC performance …
R Ritzenthaler, H Mertens, V Pena, G Santoro, A Chasin, K Kenis, ...
2018 IEEE International Electron Devices Meeting (IEDM), 21.5. 1-21.5. 4, 2018
792018
Metal gate work function tuning by Al incorporation in TiN
LPB Lima, HFW Dekkers, JG Lisoni, JA Diniz, S Van Elshocht, S De Gendt
Journal of Applied Physics 115 (7), 2014
782014
Carrier trap passivation in multicrystalline Si solar cells by hydrogen from SiNx: H layers
HFW Dekkers, L Carnel, G Beaucarne
Applied physics letters 89 (1), 2006
772006
Capacitor-less, long-retention (> 400s) DRAM cell paving the way towards low-power and high-density monolithic 3D DRAM
A Belmonte, H Oh, N Rassoul, GL Donadio, J Mitard, H Dekkers, ...
2020 IEEE International Electron Devices Meeting (IEDM), 28.2. 1-28.2. 4, 2020
732020
Silicon surface texturing by reactive ion etching
HFW Dekkers, F Duerinckx, J Szlufcik, J Nijs
Opto-electronics review 8 (4), 311-316, 2000
712000
Implementation of an industry compliant, 5× 50μm, via-middle TSV technology on 300mm wafers
A Redolfi, D Velenis, S Thangaraju, P Nolmans, P Jaenen, M Kostermans, ...
2011 IEEE 61st Electronic Components and Technology Conference (ECTC), 1384-1388, 2011
582011
The effect of composition on the bond structure and refractive index of silicon nitride deposited by HWCVD and PECVD
V Verlaan, AD Verkerk, WM Arnoldbik, CHM van der Werf, R Bakker, ...
Thin Solid Films 517 (12), 3499-3502, 2009
562009
Requirements of PECVD SiNx: H layers for bulk passivation of mc-Si
HFW Dekkers, S De Wolf, G Agostinelli, F Duerinckx, G Beaucarne
Solar energy materials and solar cells 90 (18-19), 3244-3250, 2006
562006
Gate-all-around NWFETs vs. triple-gate FinFETs: Junctionless vs. extensionless and conventional junction devices with controlled EWF modulation for multi-VT CMOS
A Veloso, G Hellings, MJ Cho, E Simoen, K Devriendt, V Paraschiv, ...
2015 Symposium on VLSI Technology (VLSI Technology), T138-T139, 2015
552015
Influence of defect type on hydrogen passivation efficacy in multicrystalline silicon solar cells
MI Bertoni, S Hudelson, BK Newman, DP Fenning, HFW Dekkers, ...
Progress in Photovoltaics: Research and Applications 19 (2), 187-191, 2011
502011
Hydrogen diffusion in silicon from plasma-enhanced chemical vapor deposited silicon nitride film at high temperature
M Sheoran, DS Kim, A Rohatgi, HFW Dekkers, G Beaucarne, M Young, ...
Applied Physics Letters 92 (17), 2008
482008
High-efficiency low-cost integral screen-printing multicrystalline silicon solar cells
J Szlufcik, F Duerinckx, J Horzel, E Van Kerschaver, H Dekkers, S De Wolf, ...
Solar energy materials and solar cells 74 (1-4), 155-163, 2002
432002
Multi‐crystalline Si solar cells with very fast deposited (180 nm/min) passivating hot‐wire CVD silicon nitride as antireflection coating
V Verlaan, CHM Van der Werf, ZS Houweling, IG Romijn, AW Weeber, ...
Progress in Photovoltaics: Research and Applications 15 (7), 563-573, 2007
412007
Rear surface passivation for industrial solar cells on thin substrates
G Agostinelli, P Choulat, HFW Dekkers, E Vermariën, G Beaucarne
2006 IEEE 4th World Conference on Photovoltaic Energy Conference 1, 1004-1007, 2006
382006
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